ELECTROSTATIC CHUCK

Details for Australian Patent Application No. 2002225171 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors TOSSELL, David, Andrew; MARTIN, Matthew, Peter

Pub. Number AU-A-2002225171

PCT Pub. Number WO2002/068714

Priority 0104341.3 22.02.01 GB

Filing date 18 January 2002

Wipo publication date 12 September 2002

International Classifications

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002225171

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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