Installation wherein is performed an operation requiring control of atmosphere inside a chamber

Details for Australian Patent Application No. 2002223753 (hide)

Owner L'Air Liquide, Societe Anonyme Pour L'Etude Et L'Exploitation Des Procedes Georges Claude

Inventors Martens, Bernd; Forster, Franck; Villermet, Alain; Thonnelier, Jean-Yves; Coeuret, Francois; Doring, Wolfgang; Gelot, Jean-Louis; Melen, Stephane; Cocolios, Panayotis; Prinz, Eckard

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2002223753

PCT Pub. Number WO02/40738

Priority 00 14793 16.11.00 FR

Filing date 6 November 2001

Wipo publication date 27 May 2002

Acceptance publication date 28 September 2006

International Classifications

C23C 16/44 (2006.01) Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 16/455 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

G05D 7/06 (2006.01) Control of flow - characterised by the use of electric means

Event Publications

9 March 2006 Assignment before Grant

  L'Air Liquide, Societe Anonyme Pour L'Etude Et L'Exploitation Des Procedes Georges Claude; Softal Electronic Erik Blumenfield GmbH & Co. The application has been assigned to L'Air Liquide, Societe Anonyme Pour L'Etude Et L'Exploitation Des Procedes Georges Claude

28 September 2006 Application Accepted

  Published as AU-B-2002223753

25 January 2007 Standard Patent Sealed

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