SMART LASER WITH FAST DEFORMABLE GRATING

Details for Australian Patent Application No. 2002221267 (hide)

Owner CYMER, INC. (a Nevada corporation)

Inventors FOMENKOV, Igor, V.; ERIE, Frederick, G.; BUCK, Jesse, D.; DAS, Palash, P.

Pub. Number AU-A-2002221267

PCT Pub. Number WO2002/056432

Priority 09/703,317 31.10.00 US

Filing date 5 October 2001

Wipo publication date 24 July 2002

International Classifications

H01S 003/08 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Construction or shape of optical resonators or components thereof

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002221267

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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