METHOD AND APPARATUS FOR MICROLITHOGRAPHY

Details for Australian Patent Application No. 2002221248 (hide)

Owner MICRONIC LASER SYSTEMS AB FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventors DURR, Peter; LAKNER, Hubert, Karl; SANDSTROM, Torbjorn

Pub. Number AU-A-2002221248

PCT Pub. Number WO2002/057851

Priority 09/765,084 18.01.01 US

Filing date 11 December 2001

Wipo publication date 30 July 2002

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002221248

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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