Owner Yeda Research and Development Co. Ltd. El-Mul Technologies Ltd.

Inventors Zik, Ory; Moses, Elisha; Thiberge, Stephan

Agent Davies Collison Cave

Pub. Number AU-B-2002221019

PCT Pub. Number WO02/45125

Priority 60306458 20.07.01 US; 60250879 01.12.00 US

Filing date 30 November 2001

Wipo publication date 11 June 2002

Acceptance publication date 8 February 2007

G01N 23/225 (2006.01) Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

G01N 1/28 (2006.01) Sampling - Preparing specimens for investigation

G01N 23/227 (2006.01) Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

H01J 37/16 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 37/20 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

H01J 37/28 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams