DIELECTRIC FILM AND METHOD OF FORMING IT, SEMICONDUCTOR DEVICE, NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2002219548 (hide)

Owner OHMI, Tadahiro

Inventors SHIRAI, Yasuyuki; OHMI, Tadahiro; SUGAWA, Shigetoshi; HIRAYAMA, Masaki

Pub. Number AU-A-2002219548

PCT Pub. Number WO2002/054474

Priority 2000-402834 28.12.00 JP; 2001-94246 28.03.01 JP

Filing date 27 December 2001

Wipo publication date 16 July 2002

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/10 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including a plurality of individual components in a repetitive configuration

H01L 029/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002219548

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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