MICROMECHANICAL FLOW SENSOR WITH A TENSILE COATING

Details for Australian Patent Application No. 2002217368 (hide)

Owner SENSIRION AG

Inventors STEINER VANHA, Ralph; TOMMASO, Francesco, Cilento

Pub. Number AU-A-2002217368

PCT Pub. Number WO2002/055967

Priority 31/01 10.01.01 CH

Filing date 20 December 2001

Wipo publication date 24 July 2002

International Classifications

G01F 001/684 Measuring volume flow - Structural arrangements

G01F 015/10 Details of, or accessories for, apparatus of groups insofar as such details or appliances are not adapted to particular types of such apparatus

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002217368

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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