IMAGING CHARACTERISTICS MEASURING METHOD, IMAGING CHARACTERIATICS ADJUSTING METHOD, EXPOSURE METHOD AND SYSTEM, PROGRAM AND RECORDING MEDIUM, AND DEVICE PRODUCING METHOD

Details for Australian Patent Application No. 2002216427 (hide)

Owner NIKON CORPORATION

Inventors TSUKAKOSHI, Toshio

Pub. Number AU-A-2002216427

PCT Pub. Number WO2002/054036

Priority 2000-402657 28.12.00 JP; 2000-402686 28.12.00 JP; 2001-359096 26.11.01 JP; 2001-359103 26.11.01 JP

Filing date 27 December 2001

Wipo publication date 16 July 2002

International Classifications

G01M 011/00 Testing of optical apparatus

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002216427

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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