METHODS OF SPUTTERING USING KRYPTON

Details for Australian Patent Application No. 2002216287 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors DONOHUE, Hilke; HARRIS, Mark, Graeme, Martin

Pub. Number AU-A-2002216287

PCT Pub. Number WO2002/053796

Priority 0100151.0 04.01.01 GB

Filing date 21 December 2001

Wipo publication date 16 July 2002

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C23C 014/04 Coating by vacuum evaporation, by sputtering or by ion implantation - Coating on selected surface areas, e.g. using masks

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002216287

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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