SEMICONDUCTOR DEVELOPING AGENT

Details for Australian Patent Application No. 2002213498 (hide)

Owner HUNTSMAN PETROCHEMICAL CORPORATION

Inventors SU, Wei-Yang; SJOBERG, Stephen, L.; CRAWFORD, Wheeler, C.

Pub. Number AU-A-2002213498

PCT Pub. Number WO2002/069052

Priority 09/789,654 21.02.01 US

Filing date 17 October 2001

Wipo publication date 12 September 2002

International Classifications

G03F 007/32 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Liquid compositions therefor, e.g. developers

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002213498

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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