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Details for Australian Patent Application No. 2002211864 (hide)

Owner CLAYTON, Gary, A.

Inventors CLAYTON, Gary, A.

Pub. Number AU-A-2002211864

PCT Pub. Number WO2003/010813

Priority 09/912,111 23.07.01 US

Filing date 3 October 2001

Wipo publication date 17 February 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002211864

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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