CARRIER INCLUDING A MULTIVOLUME DIAPHRAGM FOR POLISHING A SEMICONDUCTOR WAFER AND A METHOD THEREFOR

Details for Australian Patent Application No. 2001298108 (hide)

Owner SPEEDFAM-IPEC CORPORATION a Delaware Corporation

Inventors SHULTZ, Stephen, C.; HERB, John, D.; LEE, James, F.; LEE, Junedong; GROMKO, Robert, D.

Pub. Number AU-A-2001298108

PCT Number PCT/US2001/0076

PCT Pub. Number WO2004/017386

Priority 09/541,753 31.03.00 US

Filing date 27 March 2001

Wipo publication date 3 March 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 09/541,753 31.03.00 US

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2001298108

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