WAFER BIAS DRIVE FOR A PLASMA SOURCE

Details for Australian Patent Application No. 2001297842 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors PARSONS, Richard; JOHNSON, Wayne, L.; LONG, Maolin

Pub. Number AU-A-2001297842

PCT Number PCT/US01/51642

PCT Pub. Number WO2002/099839

Priority 60/256,387 19.12.00 US

Filing date 12 December 2001

Wipo publication date 16 December 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/256,387 19.12.00 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2001297842

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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