MODIFICATION TO FILL LAYERS FOR INLAYING SEMICONDUCTOR PATTERNS

Details for Australian Patent Application No. 2001297797 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors LAURSEN, Thomas

Pub. Number AU-A-2001297797

PCT Number PCT/US01/51639

PCT Pub. Number WO2002/089181

Priority 09/703,210 31.10.00 US

Filing date 26 October 2001

Wipo publication date 11 November 2002

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/703,210 31.10.00 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2001297797

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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