METHOD FOR FABRICATING A THROUGH-WAFER OPTICAL MEMS DEVICE HAVING AN ANTIREFLECTIVE COATING

Details for Australian Patent Application No. 2001297719 (hide)

Event Publications

19 December 2002 Complete Application Filed

Priority application(s): 60/256,674 20.12.00 US; 60/260,558 09.01.01 US; 60/256,604 19.12.00 US; 60/256,607 19.12.00 US; 60/256,610 19.12.00 US; 60/256,611 19.12.00 US; 60/256,683 19.12.00 US; 60/256,688 19.12.00 US; 60/256,689 19.12.00 US

3 April 2003 Application Open to Public Inspection

Published as AU-A-2001297719

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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