WAFER CARRIER AND METHOD OF MATERIAL REMOVAL FROM A SEMICONDUCTOR WAFER

Details for Australian Patent Application No. 2001297617 (hide)

Owner MOTOROLA, INC.

Inventors JOHN, Laura; VANELL, James, F.; GROOTEGOED, James, A.

Pub. Number AU-A-2001297617

PCT Number PCT/US01/50133

PCT Pub. Number WO2002/066206

Priority 09/714,523 16.11.00 US

Filing date 9 November 2001

Wipo publication date 4 September 2002

International Classifications

B24B 017/00 Special adaptations of machines or devices for grinding controlled by patterns, drawings, magnetic tapes or the like

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/714,523 16.11.00 US

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2001297617

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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