USE OF ENDPOINT SYSTEM TO MATCH INDIVIDUAL PROCESSING STATIONS WITHIN A TOOL

Details for Australian Patent Application No. 2001296475 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors PASADYN, Alexander, J.; HEWETT, Joyce, S., Oey

Pub. Number AU-A-2001296475

PCT Pub. Number WO2002/054481

Priority 09/753,705 03.01.01 US

Filing date 2 October 2001

Wipo publication date 16 July 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2001296475

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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