SUPPRESSION OF EMISSION NOISE FOR MICROCOLUMN APPLICATIONS IN ELECTRON BEAM INSPECTION

Details for Australian Patent Application No. 2001293258 (hide)

Owner APPLIED MATERIALS, INC.

Inventors MANKOS, Marian; CHANG, Tai-Hon, Philip; LEE, Kim, Y.; YU, Ming

Pub. Number AU-A-2001293258

PCT Pub. Number WO2003/034462

Filing date 6 September 2001

Wipo publication date 28 April 2003

International Classifications

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

Event Publications

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2001293258

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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