Method for producing a semiconductormetal contact through dielectric layer

Details for Australian Patent Application No. 2001291812 (hide)

Owner Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V.

Inventors Ludemann, Ralf; Schneiderlochner, Eric; Glunz, Stefan; Preu, Ralf

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2001291812

PCT Pub. Number WO02/25742

Priority 100 46 170.0 19.09.00 DE

Filing date 30 August 2001

Wipo publication date 2 April 2002

Acceptance publication date 3 August 2006

International Classifications

H01L 31/0224 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Electrodes

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/28 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/324 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/42 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/04 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Event Publications

3 August 2006 Application Accepted

  Published as AU-B-2001291812

7 December 2006 Standard Patent Sealed

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