NON-CONTACT PHOTOTHERMAL RADIOMETRIC METROLOGIES AND INSTRUMENTATION FOR CHARACTERIZATION OF SEMICONDUCTOR WAFERS, OPTICAL MATERIALS AND DEVICES

Details for Australian Patent Application No. 2001291564 (hide)

Owner PAOLONI, Stefano PHOTOTHERMAL DIAGNOSTICS INC. MANDELIS, Andreas GARCIA, Jose, A. NICOLAIDES, Lena

Inventors MANDELIS, Andreas; NICOLAIDES, Lena; GARCIA, Jose, A.; PAOLONI, Stefano

Pub. Number AU-A-2001291564

PCT Pub. Number WO2003/025551

Filing date 20 September 2001

Wipo publication date 1 April 2003

International Classifications

G01N 021/17 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Systems in which incident light is modified in accordance with the properties of the material investigated

Event Publications

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2001291564

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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