CHEMICAL MECHANICAL POLISHING PAD HAVING HOLES AND/OR GROOVES

Details for Australian Patent Application No. 2001284532 (hide)

Owner SKC CO., LTD.

Inventors PARK, In-Ha; KIM, Jae-Seok; KWON, Tae-Kyoung

Pub. Number AU-A-2001284532

PCT Pub. Number WO2003/017348

Priority 2001/49355 16.08.01 KR

Filing date 29 August 2001

Wipo publication date 3 March 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2001284532

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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