Fabrication of nanoelectronic circuits

Details for Australian Patent Application No. 2001281594 (hide)

Owner Unisearch Limited

Inventors Clark, Robert Graham; Buehler, Tilo Markus; Brenner, Rolf; McKinnon, Rita Patricia; Lumpkin, Nancy Ellen; Hamilton, Alexander Rudolf; Dzurak, Andrew Steven

Agent FB Rice

Pub. Number AU-B-2001281594

PCT Pub. Number WO02/19036

Priority PQ9807 31.08.00 AU

Filing date 24 August 2001

Wipo publication date 13 March 2002

Acceptance publication date 25 August 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01N 001/00 Sampling

H01L 021/3105 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/266 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 August 2005 Application Accepted

  Published as AU-B-2001281594

13 October 2005 Assignment before Grant

  Unisearch Limited The application has been assigned to Qucor Pty Ltd

22 December 2005 Standard Patent Sealed

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