Diagnosting reliability of vias by Ebeam probing

Details for Australian Patent Application No. 2001275838 (hide)

Owner Qualcomm Incorporated

Inventors Tappan, Jonathan; Xia, William; Campbell, Michael; Villafana, Martin; Watson, Tim

Agent Madderns

Pub. Number AU-B-2001275838

PCT Pub. Number WO01/98788

Priority 60/273,682 06.03.01 US; 09/877,885 08.06.01 US; 60/213,570 22.06.00 US

Filing date 21 June 2001

Wipo publication date 2 January 2002

Acceptance publication date 11 May 2006

International Classifications

G01R 31/307 (2006.01) Arrangements for testing electric properties

Event Publications

11 May 2006 Application Accepted

  Published as AU-B-2001275838

7 September 2006 Standard Patent Sealed

19 January 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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