ION BEAM SPUTTER DEPOSITION PROCESS

Details for Australian Patent Application No. 2001275109 (hide)

Owner HONEYWELL INC.

Inventors ZINS, Christopher, J.; COLE, Barrett, E.

Pub. Number AU-A-2001275109

PCT Pub. Number WO2002/099155

Filing date 1 June 2001

Wipo publication date 16 December 2002

International Classifications

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 014/08 Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 014/46 Coating by vacuum evaporation, by sputtering or by ion implantation - by ion beam produced by an external ion source

G01K 017/00 Measuring quantity of heat

G01J 005/20 Radiation pyrometry - using resistors, thermistors, or semiconductors sensitive to radiation

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2001275109

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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