Owner Shin-Etsu Handotai Co., Ltd

Inventors Kanaya, Koichi; Ohmi, Tadahiro; Ito, Tatsuo; Sugawa, Shigetoshi

Agent Wrays

Pub. Number AU-B-2001269469

PCT Pub. Number WO02/05335

Priority 2000-208870 10.07.00 JP

Filing date 6 July 2001

Wipo publication date 21 January 2002

Acceptance publication date 2 November 2006

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

C30B 15/00 (2006.01) Single-crystal growth by pulling from a melt, e.g. Czochralski method

H01L 21/28 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/028 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation