POLYMERIC ANTIREFLECTIVE COATINGS DEPOSITED BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Details for Australian Patent Application No. 2001268412 (hide)

Owner BREWER SCIENCE, INC.

Inventors SABNIS, Ram; GUERRERO, Douglas, J.

Pub. Number AU-A-2001268412

PCT Pub. Number WO2002/062593

Priority 09/778,980 02.02.01 US

Filing date 12 June 2001

Wipo publication date 19 August 2002

International Classifications

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2001268412

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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