OPTICAL MEMBER, PROCESS FOR PRODUCING THE SAME, AND PROJECTION ALIGNER

Details for Australian Patent Application No. 2001264296 (hide)

Owner NIKON CORPORATION

Inventors SHINADA, Kuninori; SAKUMA, Shigeru

Pub. Number AU-A-2001264296

PCT Pub. Number WO2002/103413

Filing date 15 June 2001

Wipo publication date 2 January 2003

International Classifications

G02B 001/02 Optical elements characterised by the material of which they are made

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2001264296

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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