Throughput enhancement for single wafer reactor

Details for Australian Patent Application No. 2001255451 (hide)

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21 December 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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