Method for measuring diffusion of photogenerated catalyst in chemically amplified resists

Details for Australian Patent Application No. 2001253582 (hide)

Owner Yale University

Inventors Feke, Gilbert D.; Grober, Robert D.

Agent Pizzeys

Pub. Number AU-B-2001253582

PCT Pub. Number WO01/79932

Priority 09837853 17.04.01 US; 60198075 17.04.00 US

Filing date 17 April 2001

Wipo publication date 30 October 2001

Acceptance publication date 2 February 2006

International Classifications

G03C 1/73 (2006.01) Photosensitive materials - containing organic compounds

G03C 5/00 (2006.01) Photographic processes or agents therefor

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

2 February 2006 Application Accepted

  Published as AU-B-2001253582

1 June 2006 Standard Patent Sealed

29 November 2007 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2001253583

2001253581