Device for x-ray lithography

Details for Australian Patent Application No. 2001250703 (hide)

International Classifications

Event Publications

23 January 2003 Application Open to Public Inspection

Published as AU-B-2001250703

24 June 2004 Application Accepted

Published as AU-B-2001250703

28 October 2004 Standard Patent Sealed

29 October 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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