METHOD OF CONTROLLING PHOTORESIST STRIPPING PROCESS AND REGENERATING PHOTORESIST STRIPPER COMPOSITION BASED ON NEAR INFRARED SPECTROMETER

Details for Australian Patent Application No. 2001244789 (hide)

Owner DONGJIN SEMICHEM CO., LTD.

Inventors PARK, Tae-Joon; KANG, Cheol-Woo; YIM, Yoon-Gil; PARK, Mi-Sun; KIM, Jong-Min

Pub. Number AU-A-2001244789

PCT Pub. Number WO2002/054156

Priority 2000/87140 30.12.00 KR

Filing date 27 March 2001

Wipo publication date 16 July 2002

International Classifications

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2001244789

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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