DIAMOND FILM DEPOSITING APPARATUS USING MICROWAVES AND PLASMA

Details for Australian Patent Application No. 2001244787 (hide)

Owner SMALL AND MEDIUM INDUSTRY PROMOTION CORPORATION

Inventors CHOE, Wayne, H.; SOHN, Hee-Sik

Pub. Number AU-A-2001244787

PCT Pub. Number WO2002/077319

Filing date 27 March 2001

Wipo publication date 8 October 2002

International Classifications

C23C 016/27 Chemical deposition or plating by decomposition

C23C 016/511 Chemical deposition or plating by decomposition

C23C 016/517 Chemical deposition or plating by decomposition

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2001244787

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2001244788-METHOD OF CONTROLLING METALLIC LAYER ETCHING PROCESS AND REGENERATING ETCHANT FOR METALLIC LAYER ETCHING PROCESS BASED ON NEAR INFRARED SPECTROMETER

2001244786