FABRICATION OF STRUCTURES OF METAL/SEMICONDUCTOR COMPOUND BY X-RAY/EUV PROJECTION LITHOGRAPHY

Details for Australian Patent Application No. 2001231458 (hide)

Owner QUANTISCRIPT INC.

Inventors DROUIN, Dominique; LAVALLEE, Eric; BEAUVAIS, Jacques

Pub. Number AU-A-2001231458

PCT Pub. Number WO2002/063394

Filing date 5 February 2001

Wipo publication date 19 August 2002

International Classifications

G03F 001/08 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals having inorganic imaging layers, e.g. chrome masks

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2001231458

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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