METHOD, ARTICLE AND COMPOSITION FOR LIMITING PARTICLE AGGREGATION IN A MASK DEPOSITED BY A COLLOIDAL SUSPENSION

Details for Australian Patent Application No. 2000240799 (hide)

Owner WELLS, David, H. HOFFMAN, James, J. MICRON TECHNOLOGY, INC.

Inventors HOFFMAN, James, J.; WELLS, David, H.

Pub. Number AU-A-2000240799

PCT Pub. Number WO2004/010229

Filing date 6 April 2000

Wipo publication date 4 March 2004

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2000240799

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 March 2004 Corrigenda

  Applications OPI - Name Index Under the names Wells, David, H. ; Hoffman, James, J. and Micron Technology, Inc., Application No. 2000240799, under INID (43) correct the date to read 09.02.2004

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